Cover of: Process, equipment, and materials control in integrated circuit manufacturing | Read Online
Share

Process, equipment, and materials control in integrated circuit manufacturing 25-26 October 1995, Austin, Texas by

  • 206 Want to read
  • ·
  • 22 Currently reading

Published by SPIE in Bellingham, Wash .
Written in English

Subjects:

  • Integrated circuits industry -- Congresses.,
  • Integrated circuits -- Design and construction -- Congresses.,
  • Manufacturing processes -- Congresses.,
  • Plasma etching -- Congresses.,
  • Metallizing -- Congresses.

Book details:

Edition Notes

Includes bibliographic references and author index.

StatementAnant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
SeriesProceedings / SPIE--the International Society for Optical Engineering ;, v. 2637, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2637.
ContributionsSabnis, Anant G., Raaijmakers, Ivo J., Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International.
Classifications
LC ClassificationsTK7836 .P73 1995
The Physical Object
Paginationvii, 238 p. :
Number of Pages238
ID Numbers
Open LibraryOL819464M
ISBN 100819420034
LC Control Number95070380
OCLC/WorldCa33331897

Download Process, equipment, and materials control in integrated circuit manufacturing

PDF EPUB FB2 MOBI RTF

Process, Equipment, and Materials Control in Integrated Circuit Manufacturing Editor(s): Anant G. Sabnis; Ivo J. Raaijmakers *This item is only available on the SPIE Digital Library. PROCEEDINGS VOLUME Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V. PROCEEDINGS VOLUME Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. Process, equipment, and materials control in integrated circuit manufacturing III: October, , Austin, Texas / Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the .

ADS Classic will be deprecated in May and retired in October Please redirect your searches to the new ADS modern form or the classic info can be found on our blog. © John Wiley & Sons, Inc. M. P. Groover, “Fundamentals of Modern Manufacturing 2/e” Integrated circuit (IC) A collection of electronic devices such as transistors, diodes, and resistors that have been fabricated and electrically intraconnected onto a small flat chip of semiconductor material •Silicon (Si) - most widely used semiconductorFile Size: 2MB. any other potentially contaminating materials. These process steps are illustrated in Figure Electrical and mechanical evaluation completes the processing. The wafers are packaged in an ultra-clean environment and sealed in the storage-shipping con-tainers. They are ready for use in the fabrication process. Basic Integrated Circuit. TECHNOLOGY BRIEF 7: INTEGRATED CIRCUIT FABRICATION PROCESS (a) Implantation: High-energy ions are driven into the silicon. Most become lodged in the first few nanometers, with decreasing concentration away from the surface. In this example, boron (an electron donor) is implanted into a silicon substrate. (b) Deposition: Atoms (or molecules).

adshelp[at] The ADS is operated by the Smithsonian Astrophysical Observatory under NASA Cooperative Agreement NNX16AC86A. Process, equipment, and materials control in integrated circuit manufacturing II: October , Austin, Texas Author: Armando Iturralde ; Te-Hua Lin ; Society of Photo-optical Instrumentation Engineers. Process, equipment, and materials control in integrated circuit manufacturing V: September, , Santa Clara, California Author: Anthony J Toprac ; Kim Dang ; Society of Photo-optical Instrumentation Engineers. B&N Book Club B&N Classics B&N Collectible Editions B&N Exclusives Books of the Month Boxed Sets Discover Pick of the Month Read It Before You Stream It Signed Books Trend Shop. Blogs. B&N Podcast B&N Reads B&N Review B&N Sci-Fi & Fantasy Blog B&N Press Blog. Special Values. Buy 1, Get 1 50% Off: Price: $